We at the University of Colorado are lucky enough to have the American Vacuum Society's ALD conference and ALE workshop hosted here in Colorado. The George group will have a strong presence this year with three posters and eight oral presentations by current group members听(not to mention those given by group alums)! Here's the schedule of George group talks:
Saturday | Atomic Layer Etching Poster Session, 6 pm
Joel Clancey,听In Situ Mass Spectrometer Studies of Volatile Etch Products During Thermal Al2O3 Atomic Layer Etching Using HF and Trimethylaluminum
David Zywotko,听Thermal Atomic Layer Etching of ZnO by 鈥淐onversion-Etch鈥� Using Hydrogen Fluoride and Trimethylaluminum
Jonas Gertsch,听SF4 as a New Fluorine Reagent for Thermal ALE: Application to Al2O3 and VO2 ALE
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Sunday听
Steven M. George,听2:00 pm, Atomic Layer Etching Session I,听Thermal Atomic Layer Etching of SiO2 by a 鈥淐onversionEtch鈥� Mechanism听
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Monday
Younghee Lee, 8:00 am, Atomic Layer Etching Session III,听Selectivity in Thermal Atomic Layer Etching (INVITED)
Nicholas Johnson, 11:15 am, Atomic Layer Etching Session III, WO3 and W Thermal Atomic Layer Etching Using 鈥淐onversion-Fluorination鈥� and 鈥淥xidation-Conversion-Fluorination鈥� Etching Mechanisms
Tommi K盲盲ri盲inen, 11:45 am, ALD Fundamentals: Emerging Applications,听Improving Processability of Poorly Flowing Pharmaceutical Powders by Atomic Layer Deposition
Jaclyn Sprenger, 4:00 pm, ALD Fundamentals: Process Development,听Boron Nitride Growth at Room Temperature Using Electron Enhanced Atomic Layer Deposition (EE-ALD)
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Tuesday
Alexander Yersak, 9:00 am, ALD Applications: Batteries I,听Comparing Temporal and Spatial Atomic Layer Deposition for Enhanced Performance of Li Ion Battery Electrodes
Andrew Cavanagh, 2:30 pm, ALD for Manufacturing,听Growth Rates During Silicon Spatial ElectronEnhanced Atomic Layer Deposition: Role of Dangling Bond Lifetime
Jasmine Wallas, 2:45 pm, ALD Applications: Batteries II,听Improving Interfacial Stability of Sulfide-Based LithiumIon-Conducting Solid Electrolytes with ALD
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Find the full ALD2017 schedule 听and look for us at the conference!